Workpackages
Leibniz Universität Hannover (LUH)
Institute for Microtechnology (imt)
Germany
– Coordination
– Design and fabrication of the electromagnetic microactuator
– System integration and head assembly
Technical University Berlin (TUB)
Microsensor & Actuator Technology (MAT)
Germany
– Micromechanical simulation and fabrication
– System integration
INESC MN
Portugal
– Development of the control electronics
– Validation
University of Cambridge (UCAM)
UK
– Development of Diamond-like carbon (DLC) coatings
– Validation
LUH Activity
– Actuator Magnetics
• Microactuator technology: High Aspect Ratio Micro Structure Technology (HARMST)
• Microactuator components:
– U-shaped soft magnetic core for magnetic flux closure
– Double-layer micro coils for excitation
– System Integration
– Head Assembly
Actuator Magnetics
Head Assembly
hTUB Activity
–Actuator Mechanics
• Silicon micromechanics for leaf springs and spacer development
• Bonding technology for system integration
INESC MN Activity
– Measurement Technology
• Developing a GMR detection system for monitoring the chiplet motion
• Creating a set of drive electronics for exciting the SLIM micro magnets allowing for both a lowering and a rotation of the chiplet
UCAM Activity
– DLC Coating
• Developing a DLC process for coating the SLIM air bearing surface (ABS)
• Performing wear tests
