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– A Slider with an Integrated Microactuator (SLIM) was devised, which is capable of actuating a read/write element of a Hard Disc Drive (HDD) in both vertical direction (adjusting the flying height) and in lateral direction (allowing second stage actuation). The read/write element is located on a chiplet attached to a mounting platform. A pair of integrated electromagnetic microactuators appropriately activates this mounting platform and thus the read/write element.

 

– This work was sponsored in part by the EC within the 6th Framework Programme.